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Grinder Tegal Used And Reconditioned Plasma Etchers Ashers

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    Description: The GaSonics Aura 1000 single-wafer photoresist asher is an automated tool designed as a flexible downstream plasma photoresist removal system for high-volume wafer fabrication. GaSonics offers the Aura in direct response to manufacturers' concern about wafer sensitivity to processing damage, reliability, and low cost of ownership.

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  • Tegal 901e plasma etcher plasma etch equipment | SemiStar

    The Tegal 901e plasma etcher plasma etch semiconductor equipment were made by Tegal Corporation and represents the Industry Standard in single-wafer Dry Etch of Polysilicon, Nitride, Silicon Oxide and the mainstay of the highly successful plasma etch system. The Tegal 901e plasma etcher plasma etch semiconductor equipment are used by the .

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